A new device with PZT ultrasonic transducers in MEMS technology
نویسندگان
چکیده
منابع مشابه
Coupling of MEMS ultrasonic transducers
MEMS ultrasonic transducers are potentially valuable in both medical and non-destructive testing applications. A prime advantage of these transducers is their wide bandwidth together with the potential for economical fabrication of detector arrays. In this paper, we discuss issues related to the coupling of these transducers to solid and liquid media. We will show that appropriate choice of the...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/078